MEMS

The Development Situation of MEMS;

微电子机械系统(MEMS)发展研究

STUDY ON THE MICRO-TORQUE MEASUREMENT FOR MICRO-ACTUATORS IN MEMS;

微电子机械系统中微致动器力矩测试技术的研究

Application and Package of Military MEMS;

军用微电子机械系统的应用及封装

Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.

微电子机械系统 (MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。

The nonlinear model of the single degree of freedom for a resonator of micro-electro-mechanical system(MEMS) is set up.

该文建立了某微电子机械系统共振器的单自由度非线性力学模型 ,由微分方程的线性化方法和一元高次方程理论 ,讨论了自由振动的平衡位置以及系统非线性自由振动的频率和运动响应的求解方法 ,给出了刚度较小时的非线性自由振动的解析解 ,这对相应的共振器设计具有一定的参考价值。

Application of Microelectromechanical Systems in Phased Array Antennas;

微电子机械系统在相控阵天线中的应用

Manufacturing Technologies for MEMS at Micro/Nanometer Level

微/纳米级微电子机械系统制造新技术

Study on a New Electromagnetic Micromotor in Micro Electronic Mechanical System;

微电子机械系统中新型电磁微电机的研究

Analysis and Design of the Architecture in 3D MEMS

三维微电子机械系统结构分析与设计

NEW MEMS MANUFACTURING TECHNOLOGIES

微电子机械系统的新制造工艺技术(英文)

Measurement of Angular Velocity in MEMS by Optical Method

微电子机械系统中转速测量的光学方法

The Advances in Wafer Bonding and MEMS

晶圆键合技术与微电子机械系统新进展

Research on the Testing Method of Mechanical Properties of Mems Materials

微电子机械系统材料力学性能测试方法的研究

Research on Mechanical Properties and Size Effects in Mems;

微电子机械系统力学性能及尺寸效应研究

Exploiting the Advantage of Regional Economy to Develop Micro Electro Mechanical System and Industry;

利用区域经济优势发展微电子机械系统及产业

Some Microelectromechanical Systems and Related LIGA Techniques

若干微电子机械系统研制及相关LIGA工艺研究

Research Advances of the Bonding Strength Measurements in MEMS

微电子机械系统键合强度检测方法研究进展

With the rapid development of MEMS technology, micro-fluids technology has been becoming one of the hot research domains of MEMS step by step.

伴随微电子机械系统的发展，微流体技术成为微电子机械领域研究的热门。

Study of a highly sensitive miniature condenser microphone based on MEMS technology

基于微电子机械系统技术的高灵敏度电容式微传声器的研制

STUDY ON THE MICRO-TORQUE MEASUREMENT FOR MICRO-ACTUATORS IN MEMS

微电子机械系统中微致动器力矩测试技术的研究

Theory and Design of Optical Current Sensor Based on MEMS

基于微电子机械系统的光学电流传感器原理与设计

RESEARCH ON COUPLED ELECTRO-MECHANICAL ANALYSIS AND APPLICATION FOR TYPICAL COMPONENTS IN MEMS

微电子机械系统中典型构件的力电耦合分析及其应用研究

at last,points out the development of MEMs applied on medical practice.

最后提出了应用于医疗领域中的微电子机械系统的发展前景。

Study on Preparation and Application of Porous Silicon-Key Material in MEMS

微电子机械系统中重要材料—多孔硅的制备和应用的研究