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Using the pressure-frequency characteristic, the GaAs cantilever acoustic sensor based on RTD is designed and processed by the control hole technology firstly, and the process integration of RTD and micro-mechanical technology is implemented.

利用此压力-频率转换特性,首次设计并利用微机械控制孔技术加工制作了基于RTD的GaAs基悬臂式声传感器结构,实现了RTD与GaAs基微机械加工技术的工艺集成。

Simulations of piezoresistive microcantilever sensors for surface stress measurements

表面应力敏感型压阻微悬臂梁传感器的模拟

Simulations of piezoresistive microcantilever sensors for surface stress measurements

表面应力敏感型压阻微悬臂梁传感器的模拟

The Position and Number Optimization Design of Sensor and Actuator on Piezoelectricity Intelligence Cantilever Beam;

压电智能悬臂梁传感器、作动器位置与数目优化设计

Performance and Optimization of Bi-material Polymeric-based Micro-cantilever Excited by Light and Heat

聚合物双层微悬臂梁传感器光热激励的特性及模拟优化

A Micromechanical Cantilever Magnetic Field Sensor and the Resonat Cantilever Electromagnetic Exciting Technique;

MEMS悬臂梁磁场传感器与谐振悬臂梁电磁驱动技术

Design and Calculation for Deuce Force Sensor of Double Cantalever Girder Strain Style

双悬臂梁应变式二分力传感器设计与计算

Micromechanical Resonant Cantilever Sensors for Bio/chemical Detection;

生化检测用集成微机械悬臂梁谐振传感器技术

Design of MEMS-based Piezoresistive Micro-cantilever Biosensor;

基于MEMS的压阻悬臂梁式生物传感器设计

Study on the Characteristics of Cantilever-type Fiber Bragg Grating Accelerometer

悬臂梁式光纤光栅加速度传感器的特性研究

Novel Capacitive Wind Speed Sensor Based on Triple-layered Cantilever Structure

基于三层悬臂梁结构的电容式风速传感器设计

Microcantilever Matrix Sensor Fabrication for Cell Traction Force Measurement

微悬臂梁矩阵细胞牵引力测量传感器研制

Interface Circuit Design and Test for MEMS Resonant Microcantilever Biological Sensors;

MEMS谐振式微悬臂梁生物传感器的接口电路设计和测试

Research of Pull-in Accelerometer Based on Cantilever Beam Mass Structure;

悬臂梁质量块结构吸合时间式加速度传感器研究

Design of Micro-cantilever-based and Magnetic Bead-based Immunosensor;

基于悬臂梁及抗体—微磁球技术的生化免疫传感器的设计

Study on a Novel Type of Piezoresistive Micro-silicon Accelerometer Based on the Cantilever with Rectangular-slits Structure

基于孔缝悬臂梁结构的新型压阻式硅微加速度传感器研究

Research of Microcantilever Biochemical Sensing Technique Based on Optical Readout

基于光学读出的微悬臂梁生化传感技术研究

Label-free detection of clenbuterol based on microcantilever

利用微悬臂梁传感对瘦肉精进行非标记检测

Keywords: micro-cantilever sensor, mechanical model, piezo-resistive materials, finite element method.

关键词：微悬臂梁感测器、学模型、阻材料、限元素法。

According to the need of testing engineering practice, a project for deuce force sensor of double cantalever girder strain style was designed.

根据实际测试工程的需要,提出一种双悬臂梁应变式二分力传感器的设计方案。