The major problem in Cu CMP is dishing, serious dishing will cause the procduct yield loss.
铜化学机械抛光是近些年发展最快的一种工艺,铜碟形是铜化学机械抛光工艺中的主要问题之一。
The sur-face defects such as dishing, erosion can reduce the thickness of copper interconnection and en-large electrical resistance, reduce both the performance and the reliability of device, further influ-ence WIWUN which cause imprecise pattern transfer in the multi-layer interconnect.
本文介绍了对Cu-CMP平坦性的仿真、模拟和实验研究,并着重分析了碟形、侵蚀和WIWUN与抛光液、线宽和图案密度、抛光速度和载荷等相关参数的关系。
Destabilized Saltation of A Dished Medal Diaphragm and their Application in passenger Cars.
碟形金属膜片失稳跳跃原理在轿车上的应用
Mechanical Analysis of Disc-Spring Cap and Optimization on Pile Driving
碟形弹簧桩帽受力分析及打桩优化计算
Design and Construction of Exterior Projecting Construction Scaffolding System of Flying-saucer-shape Roof of a Sightseeing Hall
飞碟形屋顶观光厅施工外挑架设计与施工
The Control Allocation of Flying Saucer with Uncertainties
带有不确定性的碟形飞行器控制分配研究
Development and finite element analysis of the disk spring dissipater components
碟形弹簧耗能元件的研制与有限元分析
On Local Stability of Dished Shallow Shells under Line Loads
线布载荷作用下碟形扁壳的局部稳定问题
Application Research on the Negative Stiffness of Disk Spring used in Low Frequency Precision Vibration Isolation
碟形弹簧负刚度在低频精密隔振中的应用研究
Research on the working range of compound control system of the saucer-like air vehicle
碟形飞行器复合控制系统工作范围研究
Multi-objective optimal design of the disc spring based on LINGO
基于LINGO的离合器碟形弹簧多目标优化设计
Optimum design of belleville springs of disk brake with genetic algorithms
基于遗传算法的盘式制动器碟形弹簧优化设计
We were walking in the garden a saucer.
我们正在花园里散步时,看到空中有一个像碟形的东西。
The small, saucer-shaped ice disks supplied by the Culinary Institute did not make the grade; small cubes melt too fast,…
烹调会所提供的碟形小冰片不够标准。小冰块溶解得太快。
Some scientists collect the radio waves from outer space by means of giant dish-shapde antennas.
一些科学家通过巨大碟形的天线接收外层空间之外的无线电波。
Adds a link between communications devices such as satellite dishes or wireless networks to your diagram.
在网络图中添加通信设备(如碟形卫星天线或无线网络)之间的链接。
Adds a satellite dish or similar signal receiving device to your network diagram.
在网络图中添加碟形卫星天线或类似的信号接收设备。
Drag onto the page and use with satellite, satellite dish or wireless network.
拖到绘图页上,并与卫星、碟形卫星天线、无线网络一起使用。
Use with satellite, satellite dish, wireless network, etc... to indicate a communication link.
使用卫星、碟形卫星天线、无线网络等表示通信链路。
A parabolic antenna and associated electronics for receiving and transmitting satellite signals.
地面站:接收和发射卫星信号的一个碟形天线和附属电子工程。
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